Research Project Information

Research Project Summary Information

3500 Watt ThermoRack Chiller(ST9869-1)

Solid State Cooling Systems


The ThermoRack 1200 Watt chiller was developed, with NYSERDA support, in 2001. Since then, over 100 production units have been shipped to customers, and sales have continued to increase. The ThermoRack chiller consumes 90% less electricity compared to the standard direct expansion chiller it replaces, and provides other benefits such as increased reliability, smaller foot print, quieter vibration-free operation, and reduced coolant loss. Although the current 1,200 Watt systems work well in current fab plants, the system is too small for use in the newer 300 mm fab plants being constructed today, including the proposed Advanced Mocro Devices (AMD) plant in Malta, NY. The higher cooling requirements of the larger wafer manufacturing equipment necessitated the development of a 3,500 Watt chiller. SSC has recently partnered with Lydall Industrial Thermal Solutions, a major supplier of cooling solutions to the chip manufacturing industry.

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Project Description

The objective is to develop a 3,500 Watt thermoelectric chiller for use in semiconductor manufacturing. Lessons learned from the development of the 1,200 Watt unit will be built upon for this effort. The scope includes the design and testing of beta units and the establishment of a production-ready system.


ThermoRack chillers are expected to reduce the electric consumption of a typical 300 mm fab plant by 14,600 MW-hr/yr compared to standard chillers, while also providing increased reliability. Both the new 300 mm fab at IBM Fishkill and the new AMD Malta plant will be able to use these devices. The primary metric will be units sold.

Project Results


Solid State Cooling Systems
167 Myers Corners Rd.
Wappingers Falls, NY 12590

Principle Investigator

Lloyd Young

Universities Involved


Project Type:

Product Development

Technologies Types:

Industrial Products
Advanced Materials

NYSERDA Contact Information

Edward Kear


R&D - Mfg Tech & On-Site Pwr

Contract Details

Start Date: 1/11/2010
Project Status: Active
Contract Number: ST9869-1

Last Updated: 12/6/2011