Research Project Information

Research Project Summary Information

ThermoRack 1000 High Efficiency Chiller System(ST6902-1)

Solid State Cooling Systems


Many high-tech industries, particularly semiconductor fabrication plants, have the need for very precise spot cooling. A typical fab plant's poly and metal etch processes alone require 50-60 tons of cooling to maintain process temperatures within ± 0.2 C. Since the widely used mechanical direct-expansion/chilled-water systems are slow to respond to changing loads, the typical system used today mixes chilled water with hot water to provide the required process temperatures. Thermoelectric cooling is a solid-state technology that is capable of providing very precise temperature control with no moving parts and no mixing of hot and cold.

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Project Description

In Phase I, several prototype units were constructed and tested. Several beta units were field tested at customers' sites. In Phase II, five units were supplied to IBM and five units were supplied to Philips Semiconductor for preliminary testing, evaluation, and demonstration. In Phase III, 10 production units were supplied to IBM and Philips for certification testing. In Phase IV, 10 units will be installed in the semiconductor manufacturing process at NXP Semiconductor (formerly Philips).


Reduce cooling system energy use by greater than 75% for semiconductor poly plasma etch processes (8 GW-hr/yr per plant); Reduce cooling water load by at least 75% for the same processes (3 MMton-hr/yr per plant); and eliminate the need for mechanical cooling systems with their inherent maintenance and reliability issues.

Project Results

The TermoRack 1200 thermoelectric chiller has become a commercial success.


Solid State Cooling Systems
167 Myers Corners Rd.
Wappingers Falls, NY 12590

Principle Investigator

Lloyd Young

Universities Involved


Project Type:

Product Development

Technologies Types:

Industrial Products

NYSERDA Contact Information

Edward Kear


R&D - Mfg Tech & On-Site Pwr

Contract Details

Start Date: 1/11/2010
Project Status: Active
Contract Number: ST6902-1

Last Updated: 12/6/2011