Research Project Summary Information
Ultra Dense Energy-efficient Plasma Generator(ST4859-1)
ENI Technology, Inc.
Radio-frequency (RF) generators are widely used in the manufacture of computer chips and other products. Producers of RF generators have historically used electronic circuits that yield high stability at high frequencies (2 Mhz and 13.56 Mhz), but at the expense of system efficiency (~50%). Alternate approaches have been used to improve efficiency, but these require large tuning filters that increase costs. ENI Technology, Inc., a supplier of RF generators, believes that a less expensive approach is to develop an RF generator incorporating a switch mode power supply (SMPS) to improve efficiency.
In Phase 1, ENI completed market research, product specification, design, demonstration, and review. In Phase 2, ENI was able to develop a product line and reliability test plan, build a prototype and test to specification, and review. In Phase 3, ENI completed final design documentation, beta build/test to specification, reliability tests, life tests, and electromagnetic compatibility/safety tests. ENI has also created a market-introduction plan. Finally, in Phase 4, ENI has produced twenty six pilot units that have been shipped to customers for field testing, with positive results.
The savings in energy are substantial. A typical chip fab facility might use 250 chambers, each needing five kW of (output) power. The required input power can be reduced from 3-MW to 2.2 MW for a 26% reduction in demand and energy use. In addition, the customer will realize the performance benefits cited above.
The power density goal of a 2-3x increase has been attained, along with a 15% increase in AC-RF efficiency over previous models (from 50% to 65%). In addition to these improvements, significant performance improvements were engineered into the equipment. These improvements include higher power accuracy, better fault detection and classification, and faster response times to a change in power setpoint. Currently, ENI is actively marketing their new products.
ENI Technology, Inc.
100 Highpower Rd
Rochester, NY 14623
NYSERDA Contact Information
R&D - Mfg Tech & On-Site Pwr